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昆山熙日機械設備有限公司
昆山熙日機械設備有限公司
thyrcont圖拉特真空計VSM77DVSM77DVacuumTransducer●DN25KFThedigitalcombinationtransducerVSM(Pirani/coldcathode)measuresabsolutepressurefromatmosphericpressuretoultrahighvacuum
thyrcont圖拉特真空計VSM77D
The digital combination transducer VSM (Pirani/cold cathode) measures absolute pressure from atmospheric pressure to ultrahigh vacuum.
The microcontroller intelligence of this vacuum gauge automatically manages the optional interplay of both vacuum sensors.
描述
Wide range sensor Pirani / cold cathode
Pirani with extended range allows operation of cold cathode at lower pressure and increases lifetime
Robust sensor design, insensitive against inrush of air
Digital RS485 interface and analog output signal 1.819-8.6 V
Automatic baud rate detection 9.6 kBd to 115 kBd
Two independent, potential-free relay switch points
Easily replaceable sensor heads with stored calibration data
應用
Mass spectrometry
Coating plants and vapor deposition
Measuring and controlling in fine and ultrahigh vacuum
Process engineering
Sputtering plants
Vacuum furnaces
技術參數
| WEIGHT | 0.555 kg |
|---|---|
| DIMENSIONS | 6.9 x 4.8 x 15.3 cm |
| MEASURING PRINCIPLE | Pirani / inverted magnetron, both depending on gas type |
| MATERIALS IN CONTACT WITH VACUUM | Stainl. steel 1.4307, nickel, tungsten, molybdenum, glass, ceramic |
| MEASUREMENT RANGE | 1000 – 5e-9 mbar (750 – 5e-9 Torr), max. overpressure 10 bar abs. |
| ACCURACY | 10 – 2e-3 mbar: <10 % from reading, 1000 - 10 mbar: <30 %from reading, 2e-3 mbar - 1e-8 mbar: <25% from reading |
| REPEATABILITY | 10 – 1e-2 mbar: Approx.. ±2% from reading 1e-2 – 1e-8 mbar: Approx.. ±7% from reading |
| RESPONSE TIME | 200 ms (1s for activating the cold cathode) |
| CATHODE VOLTAGE | Max. 2,5 kV |
| POWER SUPPLY | 20 – 30 VDC |
| ELECTRICAL CONNECTION | SubD 15pol., male, lockable |
| POWER CONSUMPTION | Max. 3 W, additionally 0.8 W f. EtherCAT / relays / LCD |
| OPERATING TEMPERATURE | +5…+60°C |
| STORAGE TEMPERATURE | -40…+65°C |
| MAX. BAKE OUT TEMPERATURE | 160°C at flange (electronic detached) |
| OUTPUT SIGNAL | 0 – 10 VDC, measuring range 1.819 – 8.6 VDC, log., 0.6 V/decade load resistor > 10 kOhm |
| SERIAL INTERFACE | RS485: 9.6 kBd to 115 kBd, address switch 1 – 16 |
| SWITCH POINT | 2 switch-over relays, 50 VAC / 2 A, 30 VDC / 2 A, max. 60 VA |
| VACUUM CONNECTION | DN 25 ISO-KF |
| PROTECTION CLASS | IP40 |
man_vsm-de-en-171005.pdf
vsme.pdf
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